Product Name: Graphite Boat Ceramic Support Rod
Specifications: M10*P1.5*458L-15mm (this system sends out 5 models, the latter four models are as follows: M10*444*P1.0-15mm, M10*428*P1.5-15, M8*456*P1. 25-15mm, M6*425*P1.0-16mm
Material: aluminum oxide AL2O3
Application: The carrier of PECVD coating equipment process - graphite boat parts
Performance: electrical insulation, corrosion resistance, dimensional stability.

Graphite boat is used as the carrier of solar silicon wafer PECVD coating process,

Its working principle is as follows: the silicon wafer is precisely fixed on the card point of the boat by the manipulator, and then the graphite boat is placed into the cavity of the PECVD vacuum coating equipment.

The PECVD process is used for discharge coating. The temperature in the furnace tube is as high as 600 degrees, and the medium is hydrofluoric acid. Due to the superconductivity of graphite material,

In order to prevent short circuit caused by contact between boats, 99.9 alumina ceramics are used as support rods.

The material itself is insulated and has super anti-corrosion performance, and it is not easy to burst.

Each batch has undergone a rigorous hydrofluoric acid test:

Test steps: 1. Seal and soak in the hydrofluorine dispensing solution for 1 week

                 2. Baking at a high temperature of 600 degrees or more for 3 hours

                 3. If there is a crack in the baking process or a crack under the microscope, this batch of materials will be scrapped

After years of in-depth research and continuous innovation by our technical team, the good rate of our products in terms of physical properties is as high as 99.7%